Micro and Nano Machined Electrometers 1st Edition
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Micro and Nano Machined Electrometers 1st Edition

SKU: 9789811332470

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Additional information

Full Title

Micro and Nano Machined Electrometers 1st Edition
Author(s)

Yong Zhu
Edition

1st Edition
ISBN

9789811332470, 9789811332463
Publisher

Springer
Format

PDF and EPUB

Description

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

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