Metal – Semiconductor Contacts and Devices
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Metal – Semiconductor Contacts and Devices

SKU: 9781483217796

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Additional information

Full Title

Metal – Semiconductor Contacts and Devices
Author(s)

Simon S. Cohen, Gennady Sh. Gildenblat
Edition
ISBN

9781483217796, 9780122341137
Publisher

Academic Press
Format

PDF and EPUB

Description

VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices. This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycrystalline silicon; applications of the metal-semiconductor barriers in MOS, bipolar, and MESFET digital integrated circuits; and methods for measuring the barrier height are covered as well. Process engineers, device physicists, circuit designers, and students of this discipline will find the book very useful.

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