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Impurity Doping Processes in Silicon

SKU: 9780444860958

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Additional information

Full Title

Impurity Doping Processes in Silicon

Author(s)

Wang, F.F.Y.

Edition
ISBN

9780444860958, 9780080983578

Publisher

North Holland

Format

PDF and EPUB

Description

This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.