Handbook of Sputter Deposition Technology: Principles, Technology and Applications
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Handbook of Sputter Deposition Technology: Principles, Technology and Applications

SKU: 9780815512806

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Additional information

Full Title

Handbook of Sputter Deposition Technology: Principles, Technology and Applications
Author(s)

Wasa, Kiyotaka, Hayakawa, Shigeru
Edition
ISBN

9780815512806, 9780815517740
Publisher

William Andrew Publishing
Format

PDF and EPUB

Description

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

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