Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions
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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

SKU: 9780815512202

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Additional information

Full Title

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions
Author(s)

Rossnagel, Stephen M., Westwood, William D., Cuomo, Jerome J.
Edition
ISBN

9780815512202, 9780815517641
Publisher

William Andrew Publishing
Format

PDF and EPUB

Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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